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The test methods for the individual properties have been given in this standard
It establishes a set of common definitions that help specify
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI MF671-0312 (Reapproved 1023)
備考：本文件在
M04100 - SEMI M41 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs StdPbc-0125 The test methods for theNOTICE: This Document was completely rewritten in 2022. This Specification covers requirements for silicon on insulator (SOI) for semiconductor power device IC manufacture. By defining inspection procedures and acceptance criteria, both users and suppliers may define product characteristics and quality requirements. This Specification provides requirements of SOI wafers, which are used for power devices ICs of specific voltage applications. The
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